Hongxing Yang 1,2Yan Wang 1,2Ziqi Yin 1,2Pengcheng Hu 1,2,*[ ... ]Jing Li 1,2
Author Affiliations
Abstract
1 Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China
2 Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
To ensure the frequency accuracy of a heterodyne laser source in the ambient temperature range of -20°C to 40°C, a dual-longitudinal-mode thermally stabilized He–Ne laser based on non-equilibrium power locking was designed. The ambient adaptive preheating temperature setting scheme ensured the laser could operate normally in the range of -20°C to 40°C. The non-equilibrium power-locked frequency stabilization scheme compensated for the frequency drift caused by different stabilization temperatures. The experimental results indicated that the frequency accuracy of the laser designed in this study could reach 5.2 × 10-9 in the range of -20°C to 40°C.
He–Ne laser frequency accuracy ambient adaptability non-equilibrium power locking 
Chinese Optics Letters
2024, 22(4): 041407
Ziqi Yin 1,2Fangfei Li 1,2Yunke Sun 1,2Yun Zou 1,2[ ... ]Jiubin Tan 1,2
Author Affiliations
Abstract
1 Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China
2 Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
We propose an absolute distance measurement method that employs heterodyne and superheterodyne combined interferometers to achieve synchronous detection and demodulation of multiwavelengths. Coarse and fine synthetic wavelengths are generated by a dual-longitudinal-mode He–Ne laser and four acoustic optical frequency shifters. Further, to improve phase synchronization measurement for multiwavelengths, we analyze the demodulation characteristics of coarse and fine measurement signals and adopt a demodulation method suitable for both signals. Experimental results demonstrate that the proposed method can achieve high-precision synchronous demodulation of multiwavelengths, and standard deviation is 1.7 × 10-5 m in a range of 2 m.
multiwavelength absolute distance superheterodyne interferometry phase synchronization 
Chinese Optics Letters
2024, 22(1): 011204
Author Affiliations
Abstract
1 Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China
2 Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
Laser ranging with frequency comb intermode beats (IMBs) has been suffering from random phase drifts (RPDs) for two decades. In this study, we reveal the influence of signal transmission path on the RPDs and propose a real-time suppression method using two IMBs of similar frequencies from different combs. As the two IMBs obtain similar RPDs during their transmission through same signal paths, the RPD of the original probing signal IMB is suppressed by deducting the RPD of the newly added local IMB in real time. In our experiments, a real-time suppression of RPDs is achieved using IMBs of 1001 and 1000 MHz. For the sampling time of 100 s, the effect of 19-fold suppression has been achieved. The proposed method provides a new solution for the long-standing phase drift problem in laser ranging with comb IMBs.
intermode beat random phase drift laser ranging 
Chinese Optics Letters
2023, 21(4): 041202
作者单位
摘要
1 哈尔滨工业大学超精密光电仪器工程研究所,黑龙江 哈尔滨 150080
2 超精密仪器技术及智能化工信部重点实验室,黑龙江 哈尔滨 150080
激光干涉位移测量技术因具有大量程、高分辨力、非接触式及可溯源性等特点,成为当前与下一代高端装备、超精密计量的基础性技术之一。在简要介绍国内外现有的各类亚纳米级激光干涉仪的基础上,重点从“精”“准”“快”方面综述了面向亚纳米、皮米级激光干涉位移测量技术的研究成果。首先,从激光干涉测量原理出发,分析了限制激光干涉仪中测量分辨力、速度等进一步提升的主要误差项及技术难点;其次,重点列举了近年来国内外在激光器高精度稳频、高精度干涉镜组、高速/高分辨力相位细分技术、环境补偿与控制等方面所取得的重大关键技术突破;最后,对下一代超精密激光干涉位移测量技术的发展趋势进行了总结与展望。
激光干涉仪 亚纳米与皮米测量 激光稳频 信号处理 
激光与光电子学进展
2023, 60(3): 0312016
杨宏兴 1,2付海金 1,2胡鹏程 1,2,*杨睿韬 1,2[ ... ]谭久彬 1,2
作者单位
摘要
1 哈尔滨工业大学超精密光电仪器工程研究所,黑龙江 哈尔滨 150080
2 哈尔滨工业大学超精密仪器技术及智能化工业和信息化部重点实验室,黑龙江 哈尔滨 150080

针对微电子光刻机等高端装备中提出的超精密、高速位移测量需求,哈尔滨工业大学深入探索了传统的共光路外差激光干涉测量方法和新一代的非共光路外差激光干涉测量方法,并在高精度激光稳频、光学非线性误差精准抑制、高速高分辨力干涉信号处理等多项关键技术方面取得持续突破,研制了系列超精密高速激光干涉仪,激光真空波长相对准确度最高达9.6×10-10,位移分辨力为0.077 nm,光学非线性误差最低为13 pm,最大测量速度为5.37 m/s。目前该系列仪器已成功应用于我国350 nm至28 nm多个工艺节点的光刻机样机集成研制和性能测试领域,为我国光刻机等高端装备发展提供了关键技术支撑和重要测量手段。

光学设计与制造 激光干涉 超精密高速位移测量 
激光与光电子学进展
2022, 59(9): 0922018
Author Affiliations
Abstract
1 Ultra-Precision Optoelectronic Instrument Engineering Center, Harbin Institute of Technology, Harbin 150001, China
2 Postdoctoral Research Station of Optical Engineering, Harbin Institute of Technology, Harbin 150001, China
A beam combination setup for a dual-frequency laser with orthogonal linear polarization is proposed. It consists of two polarizing beam splitters (PBSs) whose polarization axes are orthogonal to each other. A theoretical analysis demonstrates that a combined dual-frequency laser beam with this setup strictly meets orthogonal linear relation. The experimental results show that compared with the conventional setup, the ellipticity and nonorthogonality of the combined dual-frequency laser beam are significantly reduced.
120.0120 Instrumentation, measurement, and metrology 120.3180 Interferometry 140.3298 Laser beam combining 280.3420 Laser sensors 
Chinese Optics Letters
2015, 13(10): 101201

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